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Electronic microscopy and mechanical properties of AlN/Si structures

Annotation

Mechanical properties of AlN/Si structures were investigated by the dynamic micro- and nanoindentation method. Monitoring of imprints with the depth from 100 nm to 3 mkm were carries out by the method of scanning electronic microscopy.

Keywords

thin foils; aluminium nitride; micro- and nano-intending; scanning electronic microscopy

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UDC

539.12.043 : 539.211

Pages

213-215

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