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INFLUENCE OF LIGHT IN VISUAL RANGE ON MICROMECHANICAL PROPERTIES OF POROUS SILICON LAYERS, FORMED BY ELECTROCHEMICAL ANODIZATION

Annotation

Nanohardness of porous silicon was studied as a function of indentation depth by continuous stiffness measurements of Continuous Stiffness Measurements method. Porous silicon was produced by illumination-assisted electrochemical anodization method with various light wavelengths. It is found that illumination light wavelength has measurable effect on thickness of porous silicon layers and on their micromechanical properties.

Keywords

porous silicon; electrochemical anodization; illumination; nanohardness.

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UDC

538.951

Pages

908-910

References

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Received

06.06.2014

Section of issue

Scientific articles

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